ZS-HL

Der skalierbare hochpräzise Laser-Messsensor für alle Oberflächen

Der intelligente Sensor ZS-HL bietet einen überragenden dynamischen Erfassungsbereich für Oberflächen aller Art, von schwarzem Gummi bis hin zu Glas und Spiegeloberflächen, indem er sich einfach an die Anforderungen der Anwendung anpasst. Er ergänzt die bestehende ZS - Sensorfamilie durch Köpfe mit größerer Reichweite sowie höherer Linearität.

Höchste Auflösung und dynamischer Erfassungsbereich für alle Oberflächen
Modulares und skalierbares Plattformkonzept für bis zu neun Sensoren
Einfache Anwendung, Installation und Wartung
Kurze Ansprechzeit: ab 110 µs
Die Multitasking-Fähigkeit gestattet die gleichzeitige Verwendung von bis zu 4 Messmethoden in einem Controller

Alle Modelle vergleichen CAD Zeichnungen

Spezifikationen & Bestellinfo

Ordering information

Sensors

ZS-HL-series sensor heads

Optical system	Sensing distance	Beam shape	Beam diameter	Resolution1	Order code
Regular reflective models	20±1 mm	Line beam	1.0 mm × 20 µm	0.25 µm	ZS-HLDS2T
Regular reflective models	25±2 mm		2.2 mm × 45 µm	0.6 µm	ZS-HLDS2VT
Diffuse reflective models	50±5 mm		1.0 mm × 30 µm	0.25 µm	ZS-HLDS5T
	100±20 mm		3.5 mm × 60 µm	1 µm	ZS-HLDS10
	600±350 mm		16 mm × 0.3 mm	8 µm	ZS-HLDS60
	1500±500 mm		40 mm × 1.5 mm	500 µm	ZS-HLDS150

ZS-HL-series sensor heads (for nozzle gaps) also compatible with ZS-L controller

Optical system	Sensing distance	Beam shape	Beam diameter	Resolution2	Order code
Regular reflective models	10±0.5 mm	Line beam	900x25 µm	0.25 µm	ZS-LD10GT
Regular reflective models	15±0.75 mm	Line beam	900x25 µm	0.25 µm	ZS-LD15GT

ZS-L-series sensor heads

Optical system	Sensing distance	Beam shape	Beam diameter	Resolution3	Order code
Regular reflective models	20±1 mm	Line beam	900 × 25 µm	0.25 µm	ZS-LD20T
	20±1 mm	Spot beam	25 µm dia.		ZS-LD20ST
	40±2.5 mm	Line beam	2000 × 35 µm		ZS-LD40T
Diffuse reflective models	50±5 mm	Line beam	900 × 60 µm	0.8 µm	ZS-LD50
	50±5 mm	Spot beam	50 µm dia.	0.8 µm	ZS-LD50S
	80±15 mm	Line beam	900 × 60 µm	2 µm	ZS-LD80
	130±15 mm	Line beam	600 × 70 µm	3 µm	ZS-LD130
	200 ±50 mm	Line beam	900 × 100 µm	5 µm	ZS-LD200
	350 ±135 mm	Spot beam	240 µm dia.	20 µm	ZS-LD350S

ZS-HL-series sensor controllers

Supply voltage	Control outputs	Order code
24 VDC	NPN outputs	ZS-HLDC11
	PNP outputs	ZS-HLDC41
	PNP outputs	ZS-HLDC41A (incl. USB cable + Smart monitor)

Multi-controllers

Supply voltage	Control outputs	Order code
24 VDC	NPN outputs	ZS-MDC11
24 VDC	PNP outputs	ZS-MDC41

Data storage units

Supply voltage	Control outputs	Order code
24 VDC	NPN outputs	ZS-DSU11
24 VDC	PNP outputs	ZS-DSU41

Accessories (sold separately)

Controller link

Item	Order code
Controller link	ZS-XCN

Panel mount adapter

Model	Order code
For 1st controller	ZS-XPM1
For expansion (from 2nd controller on)	ZS-XPM2

Cables for connecting to a Personal Computer

Type	Quantity	Order code
RS-232C	1	ZS-XRS2
USB	1	ZS-XUSB2

Extension cables for sensor heads

Cable length	Quantity	Order code
1 m	1	ZS-XC1A
4 m	1	ZS-XC4A
5 m	1	ZS-XC5B4 , 5
8 m	1	ZS-XC8A
10 m	1	ZS-XC10B1

Logging software

Item	Order code
Smart monitor zero professional	ZS-SW11E

Memory card

Model	Order code
64 MB	F160-N64S(S)
128 MB	QM300-N128S
256 MB	F160-N256S

Safety precautions for using laser equipment

Specifications

Sensor heads

ZS-HL-series sensor heads

Item		ZS-HLDS2T		ZS-HLDS2VT	ZS-HLDS5T		ZS-HLDS10		ZS-HLDS60	ZS-HLDS150
Applicable controllers		ZS-HLDC series
Optical system		Regular reflection	Diffuse reflection	Regular reflection	Regular reflection	Diffuse reflection	Regular reflection	Diffuse reflection	Diffuse reflection	Diffuse reflection
Measuring center distance		20 mm	5.2 mm	25 mm	44 mm	50 mm	94 mm	100 mm	600 mm	1,500 mm
Measuring range		±1 mm	±1 mm	±2 mm	±4 mm	±5 mm	±16 mm	±20 mm	±350 mm	±500 mm
Light source		Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Clas							Visible semiconductor laser (wavelength 658 nm, 1 mW max., Class 2)
Beam shape		Line beam
Beam diameter1		1.0 mmx20 µm		2.2 mmx45 µm	1.0 mmx30 µm		3.5 mmx60 µm		0.3 mmx16 mm	1.5 mmx40 mm
Linearity2		±0.05% F.S.		±0.2 %F.S.	±0.1% F.S.				±0.07 %F.S. (250 mm to 750 mm) ±0.1% F.S. (750 mm to 950 mm)	±0.2 %F.S.
Resolution3		0.25 µm (No. of samples to average: 256)		0.5 µm (No. of samples to average: 128)	0.25 µm (No. of samples to average: 512)		1 µm (No. of samples to average: 64)		8 µm (average 64) (at 250 mm) 40 µm (average 64) (at 600 mm)	500 µm (average 64)
Temperature characteristic4		0.01% F.S./°C		0.1% F.S./°C	0.01% F.S./°C
Sampling cycle		110 µs (high-speed mode), 500 µs (standard mode), 2.2 ms (high-precision mode), 4.4 ms (high-sensitivity mode)
Indicators	NEAR indicator	Lits near the measurement center, and nearer than the measurement center distance inside the measuring range. Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Indicators	FAR indicator	Lits near the measurement center, and further than the measurement center distance inside the measuring range. Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient illumination		Illumination on received light surface 3,000 lx or less (incandescent light)							Illumination on received light surface 1,000 lx or less (incandescent light)	Illumination on received light surface 500 lx or less (incandescent light)
Ambient temperature		Operating: 0 to 50°C, storage: -15 to 60°C (with no icing or condensation)
Ambient humidity		Operating and storage: 35% to 85% (with no condensation)
Degree of protection		IP64		IP67	Cable length 0.5 m: IP66, cable length 2 m: IP67				IP66 (IEC60529)
Vibration resistance (destructive)		10 to 150 Hz, 0.7 mm double amplitude, 80 min each in X, Y, and Z directions
Shock resistance (destructive)		150 m/s² 3 times each in six directions (up/down, left/right, forward/backward)
Materials		Case: aluminum die-cast, front cover: glass
Cable length		0.5 m, 2 m		2 m	0.5 m, 2 m
Weight		Approx. 350 g			Approx. 600 g				Approx. 800 g

*1 Defined as 1/e² (13.5%) of the center optical intensity in the measurement center distance. The beam diameter is sometimes influenced by the ambient conditions of the workpiece such as leaked light from the main beam.

*2 This is the error on the measured value with respect to an ideal straight line. Linear curve may change according to the workpiece. The following lists the workpieces

Model	Diffusive reflection	Mirror reflection
ZS-HLDS2T	SUS block	Glass
ZS-HLDS5T/HLDS10	White alumina ceramic	Glass
ZS-HLDS60/HLDS150	White alumina ceramic	-
ZS-HLDS2VT	-	Glass

*3 This is the “peak-to-peak” displacement conversion value of the displacement output in the measurement center distance when high-resolution mode and the average number in the table are set (For ZS-HLDS60, the maximum resolution at 250 mm is also included). The following lists the workpieces.

Model	Diffusive reflection	Mirror reflection
ZS-HLDS2T	SUS block	Glass
ZS-HLDS5T	White alumina ceramic	Glass
ZS-HLDS10	White alumina ceramic
ZS-HLDS60/HLDS150	White alumina ceramic	-
ZS-HLDS2VT	-	Glass

*4 Value obtained when the sensor part and object part are fixed with an aluminum jig.

ZS-L-series sensor heads

Item		ZS-LD20T		ZS-LD20ST		ZS-LD40T		ZS-LD10GT	ZS-LD15GT
Applicable controllers		ZS-HLDC/LDC series
Optical system		Regular reflection	Diffuse reflection	Regular reflection	Diffuse reflection	Regular reflection	Diffuse reflection	Regular reflection
Measuring center distance		20 mm	6.3 mm	20 mm	6.3 mm	40 mm	30 mm	10 mm	15 mm
Measuring range		±1 mm	±1 mm	±1 mm	±1 mm	±2.5 mm	±2 mm	±0.5 mm	±0.75 mm
Light source		Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape		Line beam		Spot beam		Line beam
Beam diameter6		900 x 25 µm		25 µm dia.		2,000 x 35 µm		Approx. 25 x 900 µm
Linearity7		±0.1%F.S
Resolution8		0.25 µm		0.25 µm		0.4 µm		0.25 µm	0.25 µm
Temperature characteristic9		0.04% FS/°C		0.04% FS/°C		0.02% FS/°C		0.04% FS/°C
Sampling cycle10		110 µs (high-speed mode), 500 µs (standard mode), 2.2 ms (high-precision mode), 4.4 ms (high-sensitivity mode)
Indicators	NEAR indicator	Lights near the measuring center distance, and nearer than the measuring center distance inside the measuring range. Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Indicators	FAR indicator	Lights near the measuring center distance, and further than the measuring center distance inside the measuring range. Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient illumination		Illumination on received light surface: 3,000 lx or less (incandescent light)
Ambient temperature		Operating: 0 to 50°C, storage: -15 to 60°C (with no icing or condensation)
Ambient humidity		Operating and storage: 35% to 85% (with no condensation)
Degree of protection		Cable length 0.5 m: IP66, cable length 2 m: IP67						IP40
Materials		Case: Aluminum die-cast, front cover: Glass
Cable length		0.5 m, 2 m
Weight		Approx. 350 g						Approx. 400 g
Accessories		Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure Locks (2), instruction sheet						Laser safety labels (1 each for JIS/EN),ferrite cores (2), insure locks (2)

ZS-L-series sensor heads

Item		ZS-LD50		ZS-LD50S		ZS-LD80		ZS-LD130		ZS-LD200		ZS-LD350S
Applicable controllers		ZS-HLDC/LDC series
Optical system (reflection)		Diffuse	Regular	Diffuse	Regular	Diffuse	Regular	Diffuse	Regular	Diffuse	Regular	Diffuse
Measuring center distance		50 mm	47 mm	50 mm	47 mm	80 mm	78 mm	130 mm	130 mm	200 mm	200 mm	350 mm
Measuring range		±5 mm	±4 mm	±5 mm	±4 mm	±15 mm	±14 mm	±15 mm	±12 mm	±50 mm	±48 mm	±135 mm
Light source		Visible semiconductor laser (wavelength: 650 nm, 1 mW max., JIS Class 2)
Beam shape		Line beam		Spot beam		Line beam		Line beam		Line beam		Spot beam
Beam diameter11		900 x 60 µm		50 µm dia.		900 x 60 µm		600 x 70 µm		900 x 100 µm		240 µm dia.
Linearity12		±0.1%F.S.							±0.25%F.S.	±0.1%F.S.	±0.25%F.S.	±0.04%F.S.
Resolution13		0.8 µm		0.8 µm		2 µm		3 µm		5 µm		20 µm
Temperature characteristic14		0.02% FS/°C		0.02% FS/°C		0.01% FS/°C		0.02% FS/°C		0.02% FS/°C		0.04% FS/°C
Sampling cycle15		110 µs (high-speed mode), 500 µs (standard mode), 2.2 ms (high-precision mode), 4.4 ms (high-sensitivity mode)
Indicators	NEAR indicator	Lights near the measuring center distance, and nearer than the measuring center distance inside the measuring range. Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Indicators	FAR indicator	Lights near the measuring center distance, and further than the measuring center distance inside the measuring range. Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient.
Operating ambient illumination		Illumination on received light surface: 3,000 lx or less (incandescent light)						Illumination on received light surface: 2,000 lx or less (incandescent light)		Illumination on received light surface: 3,000 lx or less (incandescent light)
Ambient temperature		Operating: 0 to 50°C, storage: -15 to 60°C (with no icing or condensation)
Ambient humidity		Operating and storage: 35% to 85% (with no condensation)
Degree of protection		Cable length 0.5 m: IP66, cable length 2 m: IP67
Materials		Case: Aluminum die-cast, front cover: Glass
Cable length		0.5 m, 2 m
Weight		Approx. 350 g
Accessories		Laser labels (1 each for JIS/EN, 3 for FDA), ferrite cores (2), insure Locks (2), instruction sheet

Sensor controllers

ZS-HL-series sensor controllers

Item			ZS-HLDC11	ZS-HLDC41
NPN/PNP			NPN	PNP
No. of samples to average			1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1,024, 2,048, or 4,096
Number of mounted sensors			1 per sensor controller
External interface	Connection method		Serial I/O: connector, other: pre-wired (standard cable length: 2 m)
	Serial I/O	USB 2.0	1 port, full speed (12 Mbps max.), MINI-B
	Serial I/O	RS-232C	1 port, 115,200 bps. max.
	Output	Judgement output	HIGH/PASS/LOW 3 outputs NPN open collector, 30 VDC, 50 mA max., residual voltage 1.2 V max	HIGH/PASS/LOW: 3 outputs PNP open collector, 50 mA max., residual voltage 1.2 V max
	Output	Linear output	Selectable from 2 types of output, voltage or current (selected by slide switch on bottom). Voltage output: .10 to 10 V, output impedance: 40 Ω Current output: 4 to 20 mA
	Inputs	Laser OFF, ZERO reset timing, RESET	ON: Short-circuited with 0 V terminal or 1.5 V or less OFF: Open (leakage current: 0.1 mA max.)	ON: Short-circuited to supply voltage or within 1.5 V of supply voltage. OFF: Open (leakage current: 0.1 mA max.)
Functions			Display: Measured value, threshold value, voltage/current, received light amount, and resolution/terminal block output Sensing: Mode, gain, measurement object, head installation Measurement point: Average, peak, bottom, thickness, step, and calculations Filter: Smooth, average, and differentiation Outputs: Scaling, various hold values, and zero reset I/O settings: Linear (focus/correction), judgments (hysteresis and timer), non-measurement, and bank (switching and clear) System: Save, initialization, measurement information display, communications settings, key lock, language, and data load Task: Single task or multitask (up to 4)
Status indicators			HIGH (orange), PASS (green), LOW (orange), LDON (green), ZERO (green), and ENABLE (green)
Segment display		Main digital	8-segment red LED, 6 digits
Segment display		Sub-digital	8-segment green LEDs, 6 digits
LCD			16 digitsx2 rows, color of characters: green, resolution per character: 5x8 pixel matrix
Setting inputs		Setting keys	Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)
Setting inputs		Slide switch	Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)
Power supply voltage			21.6 V to 26.4 VDC (including ripple)
Current consumption			0.5 A max. (when sensor head is connected)
Ambient temperature			Operating: 0 to 50°C, storage: -15 to 60°C (with no icing or condensation)
Ambient humidity			Operating and storage: 35% to 85% (with no condensation)
Degree of protection			IP20
Materials			Case: Polycarbonate (PC)
Weight			Approx. 280 g (excluding packing materials and accessories)
Accessories			Ferrite core (1), instruction sheet

ZS-MDC11/MDC41 multi controllers

Basic specifications are the same as those for the sensor controllers.

The following points, however, are different.

(1) Sensor heads cannot be connected.

(2) A maximum 9 of controllers can be connected. Control link units are required to connect controllers.

(3) Processing functions between controllers: Math functions

Controller link unit

Connection using the ZS-XCN

Data storage units

Sensor controllers		Model	ZS-DSU11	ZS-DSU41
Number of mounted censor heads			Cannot be connected
Number of connectable controllers			10 controllers max. (ZS-MDC: 1 controller, ZS-HLDC: 9 controllers max.)16
Connectable controllers			ZS-HLDC__, ZS-MDC__
External interface	Connection method		Serial I/O: connector, other: pre-wired (standard cable length: 2 m)
	Serial I/O	USB 2.0	1 port, full speed (12 Mbps), MINI-B
	Serial I/O	RS-232C	1 port, 115,200 bps max.
	Outputs		3 outputs: HIGH, PASS, and LOW NPN open-collector, 30 VDC, 50 mA max., residual voltage: 1.2 V max.	3 outputs: HIGH, PASS, and LOW PNP open-collector, 50 mA max., residual voltage: 1.2 V max.
	Inputs		ON: Short-circuited with 0V terminal or 1.5 V or less OFF: Open (leakage current: 0.1 mA max.)	ON: Short-circuited to supply voltage or within 1.5 V of supply voltage OFF: Open (leakage current: 0.1 mA max.)
Data resolution			32 bits
Functions	Logging trigger functions		Start and stop triggers can be set separately; external triggers, data triggers (self-triggers), and time triggers
Functions	Other functions		External banks, alarm outputs, saved data format customization, and clock
Status indicators			OUT (orange), PWR (green), ACCESS (orange), and ERR (red)
Segment display			8-segment green LEDs, 6 digits
LCD			16 digitsx2 rows, color of characters: green, resolution per character: 5x8 pixel matrix
Setting inputs		Setting keys	Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys (1 to 4)
Setting inputs		Slide switch	Threshold switch (2 states: High/Low), mode switch (3 states: FUN, TEACH, and RUN)
Power supply voltage			21.6 V to 26.4 VDC (including ripple)
Current consumption			0.5 A max.
Ambient temperature			Operating: 0 to 50°C, storage: -15 to 60°C (with no icing or condensation)
Ambient humidity			Operating and storage: 35% to 85% (with no condensation)
Materials			Case: Polycarbonate (PC)
Weight			Approx. 280 g (excluding packing materials and accessories)
Accessories			Ferrite core (1) instruction sheet, tools for data storage unit: CSV file converter for data storage unit, smart analyzer macro edition (Excel macros for analysis of collected data)

1. Refer to the table of ratings and specifications for details.

2. Refer to the table of ratings and specifications for details.

3. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics in diffuse reflection mode and glass in the regular reflection mode.

4. Up to two ZS-XC_B cables can be connected (22 m max.).

5. A robot cable (ZS-XC5BR) is also available.

6. Defined as 1/e² (13.5%) of the center optical intensity at the actual measurement center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam.

7. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics in diffuse reflection mode and glass in the regular reflection mode of the ZS-LD20T/40T/50. Linearity may change according to the workpiece.

8. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics in diffuse reflection mode and glass in the regular reflection mode.

9. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.

10. This value is obtained when the measuring mode is set to the high-speed mode.

11. Defined as 1/e² (13.5%) of the center optical intensity at the actual measurement center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam.

12. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics in diffuse reflection mode and glass in the regular reflection mode of the ZS-LD20T/40T/50. Linearity may change according to the workpiece.

13. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics in diffuse reflection mode and glass in the regular reflection mode.

14. This is the value obtained at the measuring center distance when the sensor and workpiece are fixed by an aluminum jig.

15. This value is obtained when the measuring mode is set to the high-speed mode.

16. Control link units are required to connect controllers.

*2 This is the error on the measured value with respect to an ideal straight line. Linear curve may change according to the workpiece. The following lists the workpieces

*4 Value obtained when the sensor part and object part are fixed with an aluminum jig.

1. Refer to the table of ratings and specifications for details.

2. Refer to the table of ratings and specifications for details.

4. Up to two ZS-XC_B cables can be connected (22 m max.).

5. A robot cable (ZS-XC5BR) is also available.

9. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig.

10. This value is obtained when the measuring mode is set to the high-speed mode.

14. This is the value obtained at the measuring center distance when the sensor and workpiece are fixed by an aluminum jig.

15. This value is obtained when the measuring mode is set to the high-speed mode.

16. Control link units are required to connect controllers.

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